ND-500 High-vacuum diffusion pump
The working condition of the ND-500 diffusion pump depends on the temperature of the working fluid in the pump boiler. During the initial filling, it is recommended to fill the maximum volume of the working fluid. Working fluid is "VACMA OIL 500" vacuum oil (under technical specifications TU 19.20.29-061-00218526-2019). The total amount of working fluid in the ND-500 diffusion pump is a maximum of 5.5 liters, a minimum of 4 liters. The viewing window for visual inspection of the working fluid has marks of its maximum and minimum amounts. During normal operation of the pump, the level of the working fluid practically does not change.The temperature of the working fluid when the pump is operating at the maximum residual pressure is about 240°C to 255°C.
It is recommended to monitor the operation of the heaters in the ND-500 diffusion pump using one temperature sensor. The temperature sensor must be installed in a special radiator socket above the heater. If there is a loss of working fluid and an increase in the temperature of the radiators of the ND-500 diffusion pump up to 320°C, the temperature sensor should give the command to automatically turn off the heaters. The subsequent activation of the pump heaters should not be automatic and should be carried out only after cooling the system.
Water at the inlet to the cooling systems of the housing and the oil reflector must be supplied with a pressure of 0.3 MPa (3 kgf/cm2) to 0.5 MPa (5 kgf/cm2) and a temperature of plus 4 ° C to plus 25 ° C. The recommended cooling water consumption for the housing is 500 l/h, for the oil reflector it is 50 l / h. It is regulated by the outlet water temperature, which should not exceed plus 40°C. The water drain should be free (with a jet break). The required speed of action of pre-vacuum pumps at a pressure of 26 Pa (0.2 mm Hg.st) in the outlet section of the ND-500 diffusion pump should be at least 42 l/s.
To reduce the losses of the working fluid of the ND-500 diffusion pump at pressures (1·10-1- 1) Pa [(7,5·10-4- 7,5·10-3) mmHg] it is recommended to install an additional LP-500 flow-through water trap on the outlet flange.
Produced in: Kazan